01771nam 2200481Ia 450 991070994110332120180711120937.0GOVPUB-C13-1d7d08a33cb9fca929f3de4019a1ceb6(CKB)5470000002474857(OCoLC)124075057(OCoLC)995470000002474857(EXLCZ)99547000000247485720070509d2005 ua 0engurcn|||||||||txtrdacontentcrdamediacrrdacarrierA Framework for standard modular simulation application to semiconductor wafer fabrication /Heshan Li [and others][Gaithersburg, MD] :U.S. Dept. of Commerce, National Institute of Standards and Technology,[2005].1 online resource (17 pages) illustrationsNISTIR ;7236Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from page 1, viewed April 6, 2007.Includes bibliographical references.Framework for standard modular simulation Semiconductor wafersStandardsSemiconductor wafersStandards.Fernandez Emmanuel1417714Leong Swee K1417715Li Heshan1417716McLean Charles R(Charles Robert)1394916Ramirez-Hernandez Jose A1417717National Institute of Standards and Technology (U.S.)NBSNBSOCLCQOCLCOOCLCQBOOK9910709941103321A Framework for standard modular simulation3527059UNINA