01743nam 2200517Ia 450 991070994080332120180711120937.0GOVPUB-C13-2a595f0c484316cf83fd83c867fe2926(CKB)5470000002474860(OCoLC)124074935(OCoLC)995470000002474860(EXLCZ)99547000000247486020070509d2003 ua 0engurcn|||||||||txtrdacontentcrdamediacrrdacarrierWorkshop summary report scanning probe nanolithography workshop /John A. Dagata, Hiroshi Yokoyama, Francesc Perez-Murano[Gaithersburg, MD] :U.S. Dept. of Commerce, National Institute of Standards and Technology,[2003].1 online resource (86 pages) illustrationsNISTIR ;7040"January 2003."Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from page [1], viewed April 6, 2007.Includes bibliographical references.Workshop summary report NanoelectronicsNanoelectronicsfastNanoelectronics.Nanoelectronics.Dagata John A1389048Perez-Murano Francesc1417712Yokoyama Hiroshi1417713Manufacturing Engineering Laboratory (U.S.)NBSNBSOCLCQOCLCOOCLCAOCLCFOCLCQBOOK9910709940803321Workshop summary report3527058UNINA