01341aam 2200385I 450 991070992560332120160620103603.0GOVPUB-C13-f9a702ed3d9e70a40fce7ad7d955cda4(CKB)5470000002475013(OCoLC)951907165(EXLCZ)99547000000247501320160620d1987 ua 0engrdacontentrdamediardacarrierSemiconductor measurement technology a bibliography of NBS publications for the years 1962-1986 /Jane WaltersGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1987.1 online resourceNBSIR ;87-35221987.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Semiconductor measurement technology Walters Jane1405223Walters Jane1405223United States.National Bureau of Standards.NBSNBSGPOBOOK9910709925603321Semiconductor measurement technology3504030UNINA