01439aam 2200397I 450 991070992370332120151118015316.0GOVPUB-C13-99593475ea2c5e1a64977e71bc86fa05(CKB)5470000002475032(OCoLC)929878490(EXLCZ)99547000000247503220151118d1978 ua 0engrdacontentrdamediardacarrierControl of mobile-ion contamination in oxidation ambients for MOS device processing /Santos Mayo; Richard Y. Koyama; Thomas F. LeedyGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1978.1 online resourceNBSIR ;77-14041978.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Mayo Santos1407760Koyama Richard Y1417738Leedy Thomas F1417739Mayo Santos1407760United States.National Bureau of Standards.NBSNBSGPOBOOK9910709923703321Control of mobile-ion contamination in oxidation ambients for MOS device processing3527145UNINA