01300aam 2200385I 450 991070990910332120151118015317.0GOVPUB-C13-af880f5936d732a8b60a584377e466e6(CKB)5470000002475180(OCoLC)929879305(EXLCZ)99547000000247518020151118d1979 ua 0engrdacontentrdamediardacarrierSemiconductor technology program progress briefs /W. Murray BullisGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1979.1 online resourceNBSIR ;79-1591-11979.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Semiconductor technology program Bullis W. Murray1387657Bullis W. Murray1387657United States.National Bureau of Standards.NBSNBSGPOBOOK9910709909103321Semiconductor technology program3452709UNINA