01456aam 2200409I 450 991070990750332120151118015318.0GOVPUB-C13-46650f1ab275db56adeb6afb3a1077ef(CKB)5470000002475196(OCoLC)929879347(EXLCZ)99547000000247519620151118d1979 ua 0engrdacontentrdamediardacarrierLoose-particle detection in microelectronic devices /John S. Hilten; Paul S. Lederer; J. Franklin Mayo-Wells; Carol F. VezzettiGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1979.1 online resourceNBSIR ;78-15901979.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Hilten John S1392916Hilten John S1392916Lederer Paul S1392917Mayo-Wells J. Franklin1390793Vezzetti Carol F1388407United States.National Bureau of Standards.NBSNBSGPOBOOK9910709907503321Loose-particle detection in microelectronic devices3448450UNINA