01833nam 2200457I 450 991070962730332120180611090616.0(CKB)5470000002471966(OCoLC)1039718360(EXLCZ)99547000000247196620180611d2011 ua 0engurmn|||||||||txtrdacontentcrdamediacrrdacarrierUnknown gases generated from a silicon wafer grinding filtration process - Colorado /Srinivas Durgam, Robert StreicherCincinnati, OH :U.S. Department of Health and Human Services, Centers for Disease Control and Prevention, National Institute for Occupational Safety and Health,2011.1 online resource (iv, 25 pages) illustrations (some color)Health hazard evaluation report ;HETA 2008-0045-3145"November 2011."Includes bibliographical references.Semiconductor industryEmployeesHealth and hygieneColoradoIndustrial hygieneColoradoStorage tanksColoradoCarbon monoxideThreshold limit valuesColoradoFilters and filtrationColoradoSemiconductor industryEmployeesHealth and hygieneIndustrial hygieneStorage tanksCarbon monoxideThreshold limit valuesFilters and filtrationDurgam Srinivas1393353Streicher RobertNational Institute for Occupational Safety and Health,GPOGPOBOOK9910709627303321Unknown gases generated from a silicon wafer grinding filtration process - Colorado3449384UNINA