01807aam 2200457I 450 991070958560332120130219020908.0GOVPUB-C13-0ec92f2f2715db0c34a7586a1aa6bc62(CKB)5470000002479142(OCoLC)828010227(EXLCZ)99547000000247914220130219d2013 ua 0engtxtrdacontentcrdamediacrrdacarrierStandard Reference Materials(R) User's Guide for RM 8096 and 8097 The MEMS 5-in-1, 2013 Edition /Janet M. Cassard ... [and others]Gaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,2013.1 online resource (224 pages) illustrations (color)NIST special publication ;260-177"February 2013."Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page (viewed February 15, 2013).Includes bibliographical references.Standard Reference MaterialsPhysical measurementsPhysical measurements.Cassard Janet M1414129Gaitan Michael1414130Geist Jon1392974Read D. T1388201Seiler David G53724Vorburger Theodore V1414131National Institute of Standards and Technology (U.S.).Physical Measurement Laboratory, Material Measurement Laboratory.NBSNBSGPOBOOK9910709585603321Standard Reference Materials(R) User's Guide for RM 8096 and 80973512390UNINA