01474aam 2200397I 450 991070956360332120151026040613.0GOVPUB-C13-31e4efcc1d7f11254ed6e62ef31a21a1(CKB)5470000002479364(OCoLC)926748639(EXLCZ)99547000000247936420151026d1992 ua 0engrdacontentrdamediardacarrierStandard reference materials antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems /Carol F. Vezzetti, Ruth N. VarnerGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1992.1 online resourceNIST special publication ;260-1171992.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Standard reference materials Vezzetti Carol F1388407Varner Ruth N1388408Vezzetti Carol F1388407National Institute of Standards and Technology (U.S.)NBSNBSGPOBOOK9910709563603321Standard reference materials3438962UNINA