01466aam 2200397I 450 991070956350332120151026040613.0GOVPUB-C13-38c502873b5f3b9a76b8f6a223be0bb6(CKB)5470000002479365(OCoLC)926748640(EXLCZ)99547000000247936520151026d1991 ua 0engrdacontentrdamediardacarrierStandard reference materials bright-chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems /Carol F. Vezzetti, Ruth N. VarnerGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1991.1 online resourceNIST special publication ;260-1141991.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Standard reference materials Vezzetti Carol F1388407Varner Ruth N1388408Vezzetti Carol F1388407National Institute of Standards and Technology (U.S.)NBSNBSGPOBOOK9910709563503321Standard reference materials3438962UNINA