01352aam 2200409I 450 991070952750332120151026025817.0GOVPUB-C13-7f7b7f480faf28e8dfb51215fb51c9e3(CKB)5470000002479728(OCoLC)926740965(EXLCZ)99547000000247972820151026d1970 ua 0engrdacontentrdamediardacarrierSilicon device processing /Charles P. MarsdenGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1970.1 online resourceNBS special publication ;3371970.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.SiliconCongressesConference papers and proceedings.lcgftSiliconMarsden Charles P1395396Marsden Charles P1395396United States.National Bureau of Standards.NBSNBSGPOBOOK9910709527503321Silicon device processing3453857UNINA