01241aam 2200373I 450 991070950700332120151030113005.0GOVPUB-C13-33b04f8ec8253982aea2f12ae9efecfe(CKB)5470000002479935(OCoLC)927169463(EXLCZ)99547000000247993520151030d1974 ua 0engrdacontentrdamediardacarrierMicroelectronic test patterns /Martin G. BuehlerGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1974.1 online resourceNBS special publication ;400-61974.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Buehler Martin G1401144Buehler Martin G1401144United States.National Bureau of Standards.NBSNBSGPOBOOK9910709507003321Microelectronic test patterns3469436UNINA