01300aam 2200373I 450 991070950620332120151030113005.0GOVPUB-C13-1f14cc0c57f9e71de1cb065885fe8386(CKB)5470000002479944(OCoLC)927169509(EXLCZ)99547000000247994420151030d1980 ua 0engrdacontentrdamediardacarrierAccurate linewidth measurements on integrated-circuit photomasks /John M. JerkeGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1980.1 online resourceNBS special publication ;400-431980.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Jerke John M1408121Jerke John M1408121United States.National Bureau of Standards.NBSNBSGPOBOOK9910709506203321Accurate linewidth measurements on integrated-circuit photomasks3542776UNINA