01469aam 2200397I 450 991070950490332120151030113006.0GOVPUB-C13-030182d2a321d023d36c20ba7cdecd97(CKB)5470000002479957(OCoLC)927169558(EXLCZ)99547000000247995720151030d1982 ua 0engrdacontentrdamediardacarrierInterlaboratory study on linewidth measurements for antireflective chromium photomasks /John M. Jerke, M. Carroll Croarkin, Ruth N. VarnerGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1982.1 online resourceNBS special publication ;400-741982.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Jerke John M1408121Croarkin M. Carroll1408122Jerke John M1408121Varner Ruth N1388408United States.National Bureau of Standards.NBSNBSGPOBOOK9910709504903321Interlaboratory study on linewidth measurements for antireflective chromium photomasks3491242UNINA