01397aam 2200385I 450 991070950480332120151030113006.0GOVPUB-C13-4a5de3150f56866892dbe9c0d1438d3e(CKB)5470000002479958(OCoLC)927169342(EXLCZ)99547000000247995820151030d1983 ua 0engrdacontentrdamediardacarrierA FORTRAN program for analysis of data from microelectronic test structures /Richard L. Mattis, Martin G. BuehlerGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1983.1 online resourceNBS special publication ;400-751983.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Mattis Richard L1390315Buehler Martin G1401144Mattis Richard L1390315United States.National Bureau of Standards.NBSNBSGPOBOOK9910709504803321A FORTRAN program for analysis of data from microelectronic test structures3490060UNINA