01286aam 2200373I 450 991070950450332120151030113006.0GOVPUB-C13-f9865e8a4cd70498e2a6baeb75ac09bc(CKB)5470000002479961(OCoLC)927169561(EXLCZ)99547000000247996120151030d1986 ua 0engrdacontentrdamediardacarrierAnalytic analysis of ellipsometric errors /Deane Chandler-HorowitzGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1986.1 online resourceNBS special publication ;400-781986.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Chandler-Horowitz Deane1391515Chandler-Horowitz Deane1391515United States.National Bureau of Standards.NBSNBSGPOBOOK9910709504503321Analytic analysis of ellipsometric errors3542774UNINA