01438nam 2200409I 450 991070771500332120161121132620.0(CKB)5470000002467402(OCoLC)963855684(EXLCZ)99547000000246740220161121d2016 ua 0engurmn|||||||||txtrdacontentcrdamediacrrdacarrierA novel vacuum packaging design process for microelectromechanical system (MEMS) quad-mass gyroscopes /by Rohan Deshmukh, Ryan Knight and Dr William NothwangAdelphi, MD :US Army Research Laboratory,2016.1 online resource (vi, 38 pages) color illustrationsARL-TR ;7825"Sep 2016."Includes bibliographical references (pages 34-35).Novel vacuum packaging design process for microelectromechanical system GyroscopesHermetic sealingGyroscopes.Hermetic sealing.Deshmukh Rohan1421414Knight RyanNothwang WilliamU.S. Army Research Laboratory,GPOGPOBOOK9910707715003321A novel vacuum packaging design process for microelectromechanical system (MEMS) quad-mass gyroscopes3542629UNINA