01574nam 2200457I 450 991070700290332120160420145631.0(CKB)5470000002461464(OCoLC)947005053(EXLCZ)99547000000246146420160420j201506 ua 0engurcn|||||||||txtrdacontentcrdamediacrrdacarrierIntegration of nanostructures into microsensor devices on whole wafers /Azlin M. Biaggi-Labiosa [and three others]Cleveland, Ohio :National Aeronautics and Space Administration, Glenn Research Center,June 2015.1 online resource (14 pages) color illustrationsNASA/TM ;2015-218826Title from title screen (viewed on April 20, 2016)."June 2015."Includes bibliographical references (pages 12-14).MicroinstrumentationnasatMicrostructurenasatNanostructures (devices)nasatNanowiresnasatSensorsnasatMicroinstrumentation.Microstructure.Nanostructures (devices)Nanowires.Sensors.Biaggi-Labiosa Azlin M.1409485NASA Glenn Research Center,GPOGPOBOOK9910707002903321Integration of nanostructures into microsensor devices on whole wafers3496012UNINA