01522nam 2200445I 450 991070589080332120170725145325.0(CKB)5470000002453505(OCoLC)993882881(EXLCZ)99547000000245350520170717j199705 ua 0engurbn|||||||||txtrdacontentcrdamediacrrdacarrierFiber-optic temperature sensor using a thin-film Fabry-Perot interferometer /Glenn Beheim[Cleveland, Ohio] :National Aeronautics and Space Administration, [Lewis Research Center],May 1997.1 online resource (xxi, 365 pages) illustrations[NASA technical memorandum] ;107459"May 1997"--Report dcumentation page.Includes bibliographical references.Fiber opticsnasatFabry-Perot interferometersnasatInterferometrynasatTemperature sensorsnasatSilicon filmsnasatFiber optics.Fabry-Perot interferometers.Interferometry.Temperature sensors.Silicon films.Beheim Glenn1385921Lewis Research Center,GPOGPOBOOK9910705890803321Fiber-optic temperature sensor using a thin-film Fabry-Perot interferometer3497593UNINA