01913oam 2200541I 450 991070587330332120170724143013.0(CKB)5470000002453682(OCoLC)844682473(EXLCZ)99547000000245368220130526j199804 ua 0engurbn||||a|a||txtrdacontentcrdamediacrrdacarrierExperimental performance of a micromachined heat flux sensor /S. Stefanescu, R.G. DeAnna, M. MehreganyCleveland, Ohio :National Aeronautics and Space Administration, Lewis Research Center,April 1998.1 online resource (11 pages .) illustrationsNASA technical memorandum ;107517"April 1998.""Prepared for the Joint Propulsion Conference cosponsored by AIAA, ASME, SAE, and ASEE, Seattle, Washington, July 6-9, 1997.""Performing organization: NASA Lewis Research Center and U.S. Army Research Laboratory"--Report documentation page."ARL-MR-363."Includes bibliographical references (page 11).MicromachiningnasatMiniaturizationnasatFabricationnasatPolyimidesnasatThin filmsnasatMicromachining.Miniaturization.Fabrication.Polyimides.Thin films.Stefanescu S.1414230DeAnna Russell G.Mehregany M.Lewis Research Center,U.S. Army Research Laboratory.OCLCEOCLCEOCLCQGPOBOOK9910705873303321Experimental performance of a micromachined heat flux sensor3512791UNINA