01483nam 2200409I 450 991070395190332120150930105552.0(CKB)5470000002436222(OCoLC)922579784(EXLCZ)99547000000243622220150930j201409 ua 0engurcn|||||||||txtrdacontentcrdamediacrrdacarrierDesign and fabrication of a strain-powered microelectromechanical system (MEMS) switch /Cory R Knick and Christopher J MorrisAdelphi, MD :Army Research Laboratory,September 2014.1 online resource (v, 25 pages) color illustrationsARL-TR ;7095Title from title screen (viewed Sept. 30, 2015)."September 2014."Includes bibliographical references (pages 14-15).Design and fabrication of a strain-powered microelectromechanical system Microelectromechanical systemsMicrofabricationMicroelectromechanical systems.Microfabrication.Knick Cory R.1418596Morris Christopher J.U.S. Army Research Laboratory,GPOGPOBOOK9910703951903321Design and fabrication of a strain-powered microelectromechanical system (MEMS) switch3530471UNINA