01403oam 2200433Ia 450 991070147380332120120223093522.0(CKB)5470000002418337(OCoLC)227954836(EXLCZ)99547000000241833720080513d2007 ua 0engurbn|||||||||txtrdacontentcrdamediacrrdacarrierSurface analysis of reactive ion etched PZT thin films in SF6 plasma[electronic resource] /Eugene ZakarAdelphi, MD :Army Research Laboratory,[2007]1 online resource (iv, 10 pages) illustrationsARL-TR ;4284Title from title screen (viewed on Feb. 23, 2012)."September 2007."Includes bibliographical references (pages 8-9).Surfaces (Technology)AnalysisThin filmsPiezoelectricitySurfaces (Technology)Analysis.Thin films.Piezoelectricity.Zakar Eugene1387268U.S. Army Research Laboratory.DTICEDTICEOCLCQGPOBOOK9910701473803321Surface analysis of reactive ion etched PZT thin films in SF6 plasma3436893UNINA