01320oam 2200385 450 991070144930332120170906141900.0(CKB)5470000002418585(OCoLC)1003045489(EXLCZ)99547000000241858520170906j201009 ua 0engur|||||||||||txtrdacontentcrdamediacrrdacarrierFabrication of 3D silicon-based photonic crystal structure with "single" self aligned etching process /Gerard Dang, Monica Taysing-Lara, and Weimin ZhouAdelphi, MD :Army Research Laboratory,September 2010.1 online resource (iv, 8 pages) color illustrationsARL-TN ;0407Photonic crystalsNanostructured materialsPhotonic crystals.Nanostructured materials.Dang Gerard1411781Taysing-Lara MonicaZhou Weimin(Physicist),U.S. Army Research Laboratory,GPOGPOGPOBOOK9910701449303321Fabrication of 3D silicon-based photonic crystal structure with "single" self aligned etching process3503746UNINA