01691oam 2200445Ia 450 991069929220332120230902161950.0(CKB)5470000002400980(OCoLC)124076434(EXLCZ)99547000000240098020070509d2004 ua 0engurcn|||||||||txtrdacontentcrdamediacrrdacarrierPore characterization in low-k dielectric films using x-ray reflectivity[electronic resource] x-ray porosimetry /Christopher L. Soles ... [and others][Gaithersburg, Md.] :U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,[2004]1 online resource (xiii, 58 pages) illustrationsSpecial publication ;960-13NIST recommended practice guideTitle from title screen (viewed on May 3, 2007)."June 2004."Includes bibliographical references (pages 55-58).NIST special publication ;960-13.NIST recommended practice guide.Pore characterization in low-k dielectric films using x-ray reflectivity Dielectric filmsPorosityDielectric films.Porosity.Soles Christopher L1402032National Institute of Standards and Technology (U.S.)NBSNBSGPOBOOK9910699292203321Pore characterization in low-k dielectric films using x-ray reflectivity3471647UNINA