01777nam 2200469Ia 450 991069929170332120230902161933.0(CKB)5470000002400985(OCoLC)713565269(EXLCZ)99547000000240098520110420d2001 ua 0engurbn|||||||||txtrdacontentcrdamediacrrdacarrierCapacitance cell measurement of the out-of-plane expansion of thin films[electronic resource] /Chad R. Snyder, Frederick I. Mopsik[Gaithersburg, Md.] :U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,[2001]1 online resource (x, 32 pages) illustrationsNIST special publication ;no. 960-7NIST recommended practice guideTitle from title screen (viewed Apr. 19, 2011)."November 2001.""CODEN: NSPUE2."Includes bibliographical references (pages 31-32).NIST recommended practice guide.NIST special publication ;no. 960-7.Thin-film circuitsThin filmsThermal propertiesExpansion (Heat)MeasurementThin-film circuits.Thin filmsThermal properties.Expansion (Heat)Measurement.Snyder Chad R1399993Mopsik F. I1402055National Institute of Standards and Technology (U.S.)GPOGPOBOOK9910699291703321Capacitance cell measurement of the out-of-plane expansion of thin films3494589UNINA