01357nam 2200409 450 991069863560332120150929152445.0(CKB)5470000002436290(OCoLC)922547420(EXLCZ)99547000000243629020150929j201408 ua 0engurcn|||||||||txtrdacontentcrdamediacrrdacarrierHermetic encapsulation of nanoenergetic porous silicon wafer by parylene /Eugene Zakar [and five others]Adelphi, MD :Army Research Laboratory,August 2014.1 online resource (iv, 12 pages) color illustrationsARL-TR ;7025Title from title screen (viewed Sept. 29, 2015)."August 2014."Includes bibliographical references (page 11).MicroencapsulationSilicon polymersIntegrated circuitsMicroencapsulation.Silicon polymers.Integrated circuits.Zakar Eugene1387268U.S. Army Research Laboratory,GPOGPOBOOK9910698635603321Hermetic encapsulation of nanoenergetic porous silicon wafer by parylene3485268UNINA