01288oam 2200373Ka 450 991069817700332120090527091519.0(CKB)5470000002395240(OCoLC)351779555(EXLCZ)99547000000239524020090526d2008 uy 0engtxtrdacontentcrdamediacrrdacarrierThermal characterization of thin films for MEMS applications[electronic resource] /by David J. Howe and Brian MorganAdelphi, Md. :Army Research Laboratory,[2008]iv, 14 pages digital, PDF fileARL-TR ;4378Title from title screen (viewed on May 26, 2009)."February 2008."Thermal characterization of thin films for microelectromechanical systems applicationsMicroelectromechanical systemsMicroelectromechanical systems.Howe David J1395576Morgan Brian633054U.S. Army Research Laboratory.GPOGPOGPOBOOK9910698177003321Thermal characterization of thin films for MEMS applications3454347UNINA