01328nam 2200397Ia 450 991069803740332120090220163731.0(CKB)5470000002394630(OCoLC)309886255(EXLCZ)99547000000239463020090219d2008 ua 0engurmn|||||||||txtrdacontentcrdamediacrrdacarrierOptimization of PbTiO₃ seed layers for PZT MEMS actuators[electronic resource] /Luz Sanchez and Ronald G. PolcawichAdelphi, MD :Army Research Laboratory,[2008]vi, 22 pages digital, PDF fileARL-TR ;4697Title from title screen (viewed Feb. 19, 2009)."December 2008."Includes bibliographical references (page 20).Ferroelectric crystalsFerroelectric thin filmsFerroelectric crystals.Ferroelectric thin films.Sanchez Luz1391989Polcawich Ronald G1391990U.S. Army Research Laboratory.GPOGPOBOOK9910698037403321Optimization of PbTiO₃ seed layers for PZT MEMS actuators3446207UNINA