01545nam 2200469Ka 450 991069791480332120090127092413.0(CKB)5470000002393849(OCoLC)299751759(EXLCZ)99547000000239384920090127d1989 ua 0engtxtrdacontentcrdamediacrrdacarrierIon beam and plasma methods of producing diamondlike carbon films[electronic resource] /Diane M. Swec, Michael J. Mirtich, and Bruce A. Banks[Washington, D.C.] :National Aeronautics and Space Administration,[1989]1 volumeNASA technical memorandum ;102301Title from title screen (viewed Jan. 26, 2009)CarbonnasatDepositionnasatDiamondsnasatProtective coatingsnasatSputteringnasatThin filmsnasatCarbon.Deposition.Diamonds.Protective coatings.Sputtering.Thin films.Swec Diane M1405105Mirtich Michael J1405106Banks Bruce A1390437United States.National Aeronautics and Space Administration.GPOGPOBOOK9910697914803321Ion beam and plasma methods of producing diamondlike carbon films3481024UNINA