01532oam 2200421Ia 450 991069729420332120230902161606.0(CKB)5470000002385976(OCoLC)74275002(EXLCZ)99547000000238597620090122d2004 ka 0engurmn|||||||||txtrdacontentcrdamediacrrdacarrierA piezoelectric MEMS microphone based on lead zirconate titanate (PZT) thin films[electronic resource] /Ronald G. PolcawichAdelphi, MD :Army Research Laboratory,[2004]1 online resource (vi, 20 pages) illustrations (some color), charts (some color)ARL-TR ;3387Title from PDF title screen (viewed on Aug. 10, 2010)."November 2004."Includes bibliographical references (pages 17-18).ARL-TR (Aberdeen Proving Ground, Md.) ;3387.Piezoelectric MEMS microphone based on lead zirconate titanate Microelectromechanical systemsMicrophoneMicroelectromechanical systems.Microphone.Polcawich Ronald G1391990U.S. Army Research Laboratory.DTICEDTICEGPOBOOK9910697294203321A piezoelectric MEMS microphone based on lead zirconate titanate (PZT) thin films3459075UNINA