03257nam 2200697Ia 450 991063405010332120200520144314.01-280-96030-297866109603093-540-44502-110.1007/978-3-540-44502-9(CKB)1000000000399563(EBL)372793(OCoLC)185026696(SSID)ssj0000250225(PQKBManifestationID)11923346(PQKBTitleCode)TC0000250225(PQKBWorkID)10232667(PQKB)11146621(SSID)ssj0000774077(PQKBManifestationID)12330329(PQKBTitleCode)TC0000774077(PQKBWorkID)10846026(PQKB)11299922(DE-He213)978-3-540-44502-9(MiAaPQ)EBC372793(PPN)123157161(EXLCZ)99100000000039956320061215d2007 uy 0engur|n|---|||||txtccrSputtering by particle bombardment experiments and computer calculations from threshold to MeV energies /Rainer Behrisch, Wolfgang Eckstein (eds.)1st ed. 2007.Berlin Springerc20071 online resource (526 p.)Topics in applied physics ;v. 110Description based upon print version of record.3-642-07944-X 3-540-44500-5 Includes bibliographical references and index.and Overview -- Computer Simulation of the Sputtering Process -- Sputtering Yields -- Results of Molecular Dynamics Calculations -- Energy and Angular Distributions of Sputtered Species -- Chemical Sputtering -- Electronic Sputtering with Swift Heavy Ions.This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and their dependence on the incident energy and angle of incidence, as well as the energy and angular distributions of the sputtered atoms are presented. This concerns experimentally determined yields as well as a critical evaluation of the computational methods used to calculate the yields and distributions. The energies of the incident ions cover the range between a few eV up to several MeV. The influence of chemical effects between the incident ions and the atoms of the bombarded solid on the sputtering yields are also reviewed.Topics in applied physics ;v. 110.Experiments and computer calculations from threshold to MeV energiesSolid state physicsSputtering (Physics)Solid state physics.Sputtering (Physics)530.416Behrisch Rainer1753718Eckstein Wolfgang1753719MiAaPQMiAaPQMiAaPQBOOK9910634050103321Sputtering by particle bombardment4189701UNINA