01464nam 2200409 450 991062724980332120231110211556.09783031140655(electronic bk.)9783031140648(MiAaPQ)EBC7097803(Au-PeEL)EBL7097803(CKB)24866011700041(PPN)264955560(EXLCZ)992486601170004120230221d2023 uy 0engurcnu||||||||txtrdacontentcrdamediacrrdacarrierProduction planning and control in semiconductor manufacturing big data analytics and Industry 4.0 applications /Tin-Chih Toly ChenCham, Switzerland :Springer,[2023]©20231 online resource (106 pages)SpringerBriefs in Applied Sciences and Technology Print version: Chen, Tin-Chih Toly Production Planning and Control in Semiconductor Manufacturing Cham : Springer International Publishing AG,c2022 9783031140648 SpringerBriefs in Applied Sciences and Technology Product codingProduct coding.006.42Chen Toly1969-1242633MiAaPQMiAaPQMiAaPQ9910627249803321Production planning and control in semiconductor manufacturing3033720UNINA