01344nas 22004453a 450 991062614130332120171117061529.92164-1641(OCoLC)297988098(CKB)3400000000015053(CONSER)--2011203328(EXLCZ)99340000000001505320090109b20032009 --- aengur|||||||||||txtrdacontentcrdamediacrrdacarrierDigest of technical papers /International Conference on Solid-State Sensors, Actuators and MicrosystemsPiscataway, NJ IEEE©2003-2159-547X TransducersCongressesDetectorsCongressesActuatorsCongressesActuatorsfast(OCoLC)fst00796346Detectorsfast(OCoLC)fst00891594Transducersfast(OCoLC)fst01154575Conference papers and proceedings.fastTransducersDetectorsActuatorsActuators.Detectors.Transducers.681IEEE Electron Devices Society.CONFERENCE9910626141303321Digest of technical papers1886003UNINA