01671oas 22006133a 450 991062614130332120250711213020.02164-1641(OCoLC)297988098(CONSER) 2011203328(CKB)3400000000015053(EXLCZ)99340000000001505320090109b20032009 uy aengur|||||||||||txtrdacontentcrdamediacrrdacarrierDigest of technical papers /International Conference on Solid-State Sensors, Actuators and MicrosystemsPiscataway, NJ IEEE©2003-2159-547X TransducersTechnical digestDig. tech. pap.TransducersCongressesDetectorsCongressesActuatorsCongressesActuatorsfast(OCoLC)fst00796346Detectorsfast(OCoLC)fst00891594Transducersfast(OCoLC)fst01154575Conference papers and proceedings.fastTransducersDetectorsActuatorsActuators.Detectors.Transducers.681IEEE Electron Devices Society.OCLCEOCLCEOCLCEOCLCQDLCOCLCQOCLCFOCLOCLCAOCLCQOCLCLCONFERENCE9910626141303321Digest of technical papers1886003UNINA