01990nas 2200493- 450 991062613280332120220813213022.02474-3755(OCoLC)945112278(CKB)4100000008868767(CONSER)--2016203494(EXLCZ)99410000000886876720150918a20069999 --- aengtxtrdacontentcrdamediacrrdacarrierIEEE International Conference on Nano/Micro Engineered and Molecular SystemsPiscataway, New Jersey :IEEE... Annual IEEE International Conference on Nano/Micro Engineered and Molecular SystemsNEMS ...Proceedings of ... IEEE Int. Conf. on Nano/Micro Engineered and Molecular SystemsProceedings of ... IEEE International Conference on Nano/Micro Engineered and Molecular SystemsInternational Conference on Nano/Micro Engineered and Molecular SystemsNanoelectromechanical systemsCongressesMicroelectromechanical systemsCongressesMicroelectromechanical systemsfast(OCoLC)fst01019745Nanoelectromechanical systemsfast(OCoLC)fst01741807Nanosystèmes électromécaniquesCongrèsMicrosystèmes électromécaniquesCongrèsPeriodicals.fastConference papers and proceedings.fastNanoelectromechanical systemsMicroelectromechanical systemsMicroelectromechanical systems.Nanoelectromechanical systems.Nanosystèmes électromécaniquesMicrosystèmes électromécaniques621.381Institute of Electrical and Electronics Engineers,CONFERENCE9910626132803321IEEE International Conference on Nano1886283UNINA