02832oas 22008533a 450 991062519720332120260127110534.01558-2345(DE-599)ZDB2035198-7(OCoLC)60638452(CONSER) 2005212499(CKB)954925559520(DE-599)2035198-7(EXLCZ)9995492555952020050615a19889999 sy aengurun|||||||||txtrdacontentcrdamediacrrdacarrierIEEE transactions on semiconductor manufacturing a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits CouncilNew York, N.Y. Institute of Electrical and Electronics EngineersRefereed/Peer-reviewed0894-6507 Institute of Electrical and Electronics Engineers transactions on semiconductor manufacturingTransactions on semiconductor manufacturingSemiconductor manufacturingIEEE trans. semicond. manuf.SemiconductorsDesign and constructionPeriodicalsSemi-conducteursPériodiquesCircuits intégrés à très grande échellePériodiquesSemi-conducteursPériodiquesSemiconductorsDesign and constructionfast(OCoLC)fst01112213periodicals.aatPeriodicals.fastPeriodicals.lcgftPériodiques.rvmgfSemiconductorsDesign and constructionSemi-conducteursPériodiques.Circuits intégrés à très grande échelleSemi-conducteursSemiconductorsDesign and construction.621621.3815/2IEEE Components, Hybrids, and Manufacturing Technology SocietyIEEE Electron Devices SocietyIEEE Reliability SocietyIEEE Solid-State Circuits CouncilInstitute of Electrical and Electronics EngineersOCLCSOCLCSNSDOCLCQOCLCFOCLCOVT2OCLCAOCLCQOCLCAUKMGBOCLCQUABOCLCLNTDU9SCSURCELVTS2HOCLCQJOURNAL9910625197203321IEEE transactions on semiconductor manufacturing2577480UNINA