01490nas 22003973a 450 991062519720332120240413015826.01558-2345(OCoLC)60638452(CKB)954925559520(CONSER) 2005212499(DE-599)ZDB2035198-7(EXLCZ)9995492555952020050615a19889999 sy aengurun||||||txtrdacontentcrdamediacrrdacarrierIEEE transactions on semiconductor manufacturing a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits CouncilNew York, N.Y. Institute of Electrical and Electronics EngineersRefereed/Peer-reviewed0894-6507 SemiconductorsDesign and constructionPeriodicalsSemiconductorsDesign and construction621621.3815/2IEEE Components, Hybrids, and Manufacturing Technology Society.IEEE Electron Devices Society.IEEE Reliability Society.IEEE Solid-State Circuits Council.Institute of Electrical and Electronics Engineers.JOURNAL9910625197203321IEEE transactions on semiconductor manufacturing2577480UNINA