01872oas 22006733a 450 991062516480332120250605213024.02160-5041(OCoLC)488386593(CONSER) 2011200084(CKB)2550000000030548(EXLCZ)99255000000003054820091213b20072009 uy aengurmn|||||||||txtrdacontentcrdamediacrrdacarrierIEEE/LEOS International Conference on Optical MEMS and Nanophotonics [proceedings]Piscataway, N.J. IEEE2160-5033 Optical MEMS and NanophotonicsInternational Conference on Optical MEMS and NanophotonicsIEEE/LEOS Int. Conf. Opt. MEMS NanophotonicsMicroelectromechanical systemsCongressesNanophotonicsCongressesMicroelectromechanical systemsfast(OCoLC)fst01019745Nanophotonicsfast(OCoLC)fst01744190Periodicals.fastConference papers and proceedings.fastMicroelectromechanical systemsNanophotonicsMicroelectromechanical systems.Nanophotonics.621Institute of Electrical and Electronics Engineers.HUAHUADLCOCLCFOCLCOOCLOCLCOOCLCQOCLCAAU@DLCOCLCNCGMUUMOCLDLCOCLCQU3WOCLCLCONFERENCE9910625164803321IEEE878179UNINA