01272nam 2200397 450 991058338340332120220907222809.00-12-813347-3(CKB)4100000002037904(MiAaPQ)EBC5231691(NjHacI)994100000002037904(EXLCZ)99410000000203790420220907d2018 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrierQuantitative Data Processing in Scanning Probe Microscopy SPM Applications for Nanometrology /Petr KlapetekSecond edition.San Diego :Elsevier Science,[2018]©20181 online resource (xviii, 397 pages) illustrationsMicro & nano technologiesIncludes bibliographical references and index.Micro & nano technologies.Scanning probe microscopyScanning probe microscopy.620.5Klapetek Petr996131NjHacINjHaclBOOK9910583383403321Quantitative data processing in scanning probe microscopy2887579UNINA