01542nam 2200433 450 991056129700332120231110233352.0981-19-1918-6(MiAaPQ)EBC6954104(Au-PeEL)EBL6954104(CKB)21522630700041(PPN)262168812(EXLCZ)992152263070004120221120d2022 uy 0engurcnu||||||||txtrdacontentcrdamediacrrdacarrierProceedings of the 7th International Conference on Nanomanufacturing (nanoMan2021) /Shuming Yang [and three others]Singapore :Springer,[2022]©20221 online resource (309 pages)Smart Innovation, Systems and Technologies ;v.296Print version: Yang, Shuming Proceedings of the 7th International Conference on Nanomanufacturing (nanoMan2021) Singapore : Springer Singapore Pte. Limited,c2022 9789811919176 Smart Innovation, Systems and Technologies NanotechnologyResearchNanotechnologySafety measuresNanotechnologyResearch.NanotechnologySafety measures.620.5Yang ShumingMiAaPQMiAaPQMiAaPQBOOK9910561297003321Proceedings of the 7th International Conference on Nanomanufacturing (nanoMan2021)2968753UNINA