03325nam 2200661z- 450 991055712460332120231214133239.0(CKB)5400000000040808(oapen)https://directory.doabooks.org/handle/20.500.12854/68292(EXLCZ)99540000000004080820202105d2021 |y 0engurmn|---annantxtrdacontentcrdamediacrrdacarrierMicro- and Nano-Fabrication by Metal Assisted Chemical EtchingBasel, SwitzerlandMDPI - Multidisciplinary Digital Publishing Institute20211 electronic resource (106 p.)3-03943-845-X 3-03943-846-8 Metal-assisted chemical etching (MacEtch) has recently emerged as a new etching technique capable of fabricating high aspect ratio nano- and microstructures in a few semiconductors substrates—Si, Ge, poly-Si, GaAs, and SiC—and using different catalysts—Ag, Au, Pt, Pd, Cu, Ni, and Rh. Several shapes have been demonstrated with a high anisotropy and feature size in the nanoscale—nanoporous films, nanowires, 3D objects, and trenches, which are useful components of photonic devices, microfluidic devices, bio-medical devices, batteries, Vias, MEMS, X-ray optics, etc. With no limitations of large-areas and low-cost processing, MacEtch can open up new opportunities for several applications where high precision nano- and microfabrication is required. This can make semiconductor manufacturing more accessible to researchers in various fields, and accelerate innovation in electronics, bio-medical engineering, energy, and photonics. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel methodological developments in MacEtch, and its use for various applications.History of engineering & technologybicsscporous siliconPd nanoparticles-assisted chemical etchingetching rateethanol electrooxidationX-ray diffractive opticszone platehigh aspect ratio nanostructuresmetal-assisted chemical etchingelectroless depositionAl2O3 nanotubeultra-high aspect ratiogold (Au) metal assisted chemical etchingatomic layer depositionanisotropic dry etchingsilicon conesmetal assisted chemical etchingtransversal poresantireflectionblack GaAsphoton recyclingX-ray grating interferometrycatalystsilicongold electroplatingmagnetically guided metal-assisted chemical etchingbulk Si etchingcurved Si structurecatalyst encapsulationHistory of engineering & technologyRomano Luciaedt1322889Romano LuciaothBOOK9910557124603321Micro- and Nano-Fabrication by Metal Assisted Chemical Etching3035223UNINA