01253nam 2200433 450 991055527230332120200722163714.01-5231-2796-13-527-81864-23-527-81865-03-527-81866-9(CKB)4100000007650781(MiAaPQ)EBC5695582(EXLCZ)99410000000765078120190302d2019 uy 0engurcnu||||||||txtrdacontentcrdamediacrrdacarrierCatalytic chemical vapor deposition technology and applications of Cat-CVD /Hideki Matsumura [and three others]Weinheim, Germany :Wiley-VCH,[2019]©20191 online resource (440 pages)3-527-34523-X CatalystsChemical vapor depositionElectronic books.Catalysts.Chemical vapor deposition.660.2995Matsumura H(Hideki),1218595MiAaPQMiAaPQMiAaPQBOOK9910555272303321Catalytic chemical vapor deposition2818084UNINA