01212oam 2200421 450 991055519700332120210615234443.01-118-69625-51-118-69623-91-118-69622-0(CKB)4330000000006815(MiAaPQ)EBC6452654(EXLCZ)99433000000000681520210615d2021 uy 0engurcnu||||||||txtrdacontentcrdamediacrrdacarrierWafer manufacturing shaping of single crystal silicon wafers /Imin Kao, Chunhui ChungHoboken, New Jersey :John Wiley & Sons, Incorporated,[2021]©20211 online resource (307 pages) illustrationsIncludes index.0-470-06121-9 Semiconductor wafersElectronic books.Semiconductor wafers.621.38152Kao Imin1217544Chung ChunhuiMiAaPQMiAaPQUtOrBLWBOOK9910555197003321Wafer manufacturing2815773UNINA