01478nam 2200433 450 991055486270332120220920132722.01-119-82688-81-119-82690-X1-119-82689-6(MiAaPQ)EBC6883652(Au-PeEL)EBL6883652(CKB)21069106300041(PPN)264345649(EXLCZ)992106910630004120220920d2022 uy 0engurcnu||||||||txtrdacontentcrdamediacrrdacarrierMicrowave plasma sources and methods in processing technology /Ladislav Bardos, Hana Barankova, Uppsala University, Uppsala, SwedenHoboken, New Jersey :John Wiley & Sons,[2022]©20221 online resource (262 pages)Print version: Bardos, Ladislav Microwave Plasma Sources and Methods in Processing Technology Newark : John Wiley & Sons, Incorporated,c2022 9781119826873 Includes bibliographical references and index.ElectromagnetismElectromagnetism.660.044Bardos Ladislav1947-1258930Barankova Hana1951-MiAaPQMiAaPQMiAaPQBOOK9910554862703321Microwave plasma sources and methods in processing technology2917426UNINA