01257nam 2200445 450 991052296480332120220706095043.03-030-79749-X(CKB)5100000000044194(MiAaPQ)EBC6767926(Au-PeEL)EBL6767926(OCoLC)1281985431(PPN)258301988(EXLCZ)99510000000004419420220706d2022 uy 0engurcnu||||||||txtrdacontentcrdamediacrrdacarrierAdvanced MEMS/NEMS fabrication and sensors /Zhuoqing Yang, editorCham, Switzerland :Springer,[2022]©20221 online resource (312 pages)3-030-79748-1 Microelectromechanical systemsNanoelectromechanical systemsMicrofabricationMicroelectromechanical systems.Nanoelectromechanical systems.Microfabrication.621.381Yang ZhuoqingMiAaPQMiAaPQMiAaPQBOOK9910522964803321Advanced MEMS2595226UNINA