01576nam 2200469 450 991048430070332120211020211242.0981-16-0606-4(CKB)4100000011867210(MiAaPQ)EBC6536809(Au-PeEL)EBL6536809(OCoLC)1245579480(PPN)255292600(EXLCZ)99410000001186721020211020d2021 uy 0engurcnu||||||||txtrdacontentcrdamediacrrdacarrierDesign and development of MEMS based guided beam type piezoelectric energy harvester /Shanky Saxena, Ritu Sharma, B.D. PantSingapore :Springer,[2021]©20211 online resource (204 pages)Energy Systems in Electrical Engineering981-16-0605-6 Energy systems in electrical engineering.Piezoelectric devicesDesign and constructionMicroelectromechanical systemsDesign and constructionPiezoelectric devicesDesign and construction.Microelectromechanical systemsDesign and construction.621.43Saxena Shanky849981Sharma RituPant B. D.MiAaPQMiAaPQMiAaPQBOOK9910484300703321Design and development of MEMS based guided beam type piezoelectric energy harvester1897926UNINA