02660oam 2200505 450 991048339150332120220912173722.03-030-61652-510.1007/978-3-030-61652-6(CKB)4100000011508825(MiAaPQ)EBC6381324(DE-He213)978-3-030-61652-6(PPN)258088397(EXLCZ)99410000001150882520210415d2021 uy 0engurnn#---mamaatxtrdacontentcrdamediacrrdacarrierMicroactuators, microsensors and micromechanisms MAMM 2020, Ilmenau, Germany, November 2020 /editors, Lena Zentner, Steffen Strehle1st edition 2021.Cham, Switzerland :Springer,[2021]©20211 online resource (VIII, 149 p. 50 illus.)Mechanisms and Machine Science,2211-0984 ;96Includes index.3-030-61651-7 This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The volume gathers twelve contributions presented at the 5th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Ilmenau, Germany in November 2020. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. The conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).Mechanisms and Machine Science,2211-0984 ;96MicroactuatorsCongressesMicroelectromechanical systemsCongressesMicroactuatorsMicroelectromechanical systems621.381Zentner Lena1964-Strehle SteffenMAMM (Workshop)MiAaPQMiAaPQUtOrBLWBOOK9910483391503321Microactuators, microsensors and micromechanisms2846515UNINA