02359nam 2200397 450 991046914910332120230414195400.01-66540-364-0(CKB)5590000000440525(NjHacI)995590000000440525(EXLCZ)99559000000044052520230414d2020 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier2020 International Symposium on Semiconductor Manufacturing (ISSM) proceedings of technical papers : December 15-16, 2020 /Institute of Electrical and Electronics EngineersPiscataway, New Jersey :IEEE,2020.1 online resource (141 pages) illustrations1-66544-773-7 ISSM is an annual conference of semiconductor manufacturing professionals dedicated to sharing technical solutions and opinions on the advancement of manufacturing science, technologies, and management disciplines ISSM aims to establish new concepts for semiconductor manufacturing technologies and to promote them as systemized and universalized technologies ISSM s role has been to challenge the concept of shifting from know how to science in semiconductor manufacturing technologies ISSM covers the areas of interest including factory design & material handling, manufacturing strategy and operation management, manufacturing control and execution, environment safety and health, process integration, process and material optimization, yield enhancement methodology, contamination control and ultraclean technology, process control and monitoring, process and metrology equipment, DFM, and final manufacturing.2020 International Symposium on Semiconductor Manufacturing Computer integrated manufacturing systemsCongressesEngineering designCongressesManufacturing processesData processingCongressesComputer integrated manufacturing systemsEngineering designManufacturing processesData processing670.285NjHacINjHaclPROCEEDING99104691491033212020 International Symposium on Semiconductor Manufacturing (ISSM)2534250UNINA