03938nam 22006131 450 991046487230332120200520144314.03-908158-89-3(CKB)3710000000025529(EBL)1872935(SSID)ssj0001189914(PQKBManifestationID)11652826(PQKBTitleCode)TC0001189914(PQKBWorkID)11178998(PQKB)10942301(MiAaPQ)EBC1872935(Au-PeEL)EBL1872935(CaPaEBR)ebr10777869(OCoLC)897641110(EXLCZ)99371000000002552920130228d2013 uy 0engur|n|---|||||txtccrNext generation micro/nano systems selected, peer reviewed papers from the Symposium E "Next Generation Micro/Nano Systems" of CIMTEC 2012 - 4th International Conference "Smart materials, Structures and Systems", held in Montecatini Terme, Italy, June 10-14, 2012 /edited by Pietro Vincenzini, Leandro LorenzelliDurnten-Zurich :Trans Tech Publications Ltd,[2013]©20131 online resource (118 p.)Advances in science and technology,1662-0356 ;v. 81Description based upon print version of record.3-908158-67-2 Includes bibliographical references and indexes.Next Generation Micro/Nano Systems; Preface and Committees; Table of Contents; Chapter 1: Physical, Chemical and Optical MEMS; History and Recent Progress of MEMS Physical Sensors; Continuous Process for Large-Area Flexible MEMS; Novel Plasmonic Bio-Sensing System Based on Two-Dimensional Gold Patch Arrays for Linear and Nonlinear Regimes; Micromachined Devices for Use in Terahertz Applications; Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon; Wet-Etching Characteristics of SiCN Films Deposited by HWCVD MethodModeling of Piezo-Actuated Stick-Slip Micro-Drives: An OverviewForeign Bodies - The Creation of Symbiotic Jewellery through the Development and Application of Stimulus-Responsive Smart Materials and Microelectromechanical Systems; Chapter 2: Radiofrequency MEMS; Integrated Microsystems; RF-MEMS Components and Networks for High-Performance Reconfigurable Telecommunication and Wireless Systems; Functional RF Devices Powered by MEMS Technologies; Chapter 3: Micro(Nano) Fluidics; Microfluidic Microchemomechanical Systems; Hydrogel-Based Microfluidic SystemsSuper-Hydrophilic PDMS and PET Surfaces for Microfluidic DevicesNew Viscosity Data for CuO-Water Nanofluid - The Hysteresis Phenomenon Revisited; Keywords Index; Authors IndexThe 15 peer-reviewed papers collected here together offer a plenitude of up-to-date information on ""Next Generation Micro/Nano Systems"". The papers are conveniently arranged into: Chapter 1: Physical, Chemical and Optical MEMS, Chapter 2: Radiofrequency MEMS, Chapter 3: Micro/Nano Fluidics. Review from Book News Inc.: Once again the conference was broken down into 10 symposia and several focused and special sessions so the 800 papers had a little elbow room. The symposium documented here covered physical, chemical, and optical micro-electro-mechanical systems (MEMS); radiofrequency MEMS; andAdvances in Science and TechnologySmart materialsCongressesSmart structuresCongressesElectronic books.Smart materialsSmart structures620.19Vincenzini P.1939-19040Lorenzelli Leandro1000675MiAaPQMiAaPQMiAaPQBOOK9910464872303321Next generation micro2296894UNINA