02820oam 2200673I 450 991046302190332120200520144314.00-429-08792-61-61583-947-X90-04-19095-310.1201/b12181 (CKB)2670000000311395(EBL)1109848(OCoLC)827211774(SSID)ssj0000595843(PQKBManifestationID)11392923(PQKBTitleCode)TC0000595843(PQKBWorkID)10575121(PQKB)10410158(MiAaPQ)EBC1109848(Au-PeEL)EBL1109848(CaPaEBR)ebr10644872(CaONFJC)MIL501668(OCoLC)713869534(EXLCZ)99267000000031139520180331d2010 uy 0engur|n|---|||||txtccrAdhesion aspects in MEMS-NEMS /edited by S. H. Kim, M. T. Dugger and K. L. MittalLeiden ;Boston :Brill ;Biggleswade :Extenza Turpin [distributor],2010.1 online resource (424 p.)Description based upon print version of record.90-04-19094-5 Includes bibliographical references.pt. 1. Understanding through continuum theory -- pt. 2. Computer simulation of interfaces -- pt. 3. Adhesion and friction measurements -- pt. 4. Adhesion in practical applications -- pt. 5. Adhesion mitigation strategies.Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surfaceMicroelectromechanical systemsNanoelectromechanical systemsAdhesionSurfaces (Technology)Electronic books.Microelectromechanical systems.Nanoelectromechanical systems.Adhesion.Surfaces (Technology)621.381Kim Seong H856168Dugger Michael T856169Mittal K. L.1945-748276MiAaPQMiAaPQMiAaPQBOOK9910463021903321Adhesion aspects in MEMS-NEMS1911576UNINA