04799nam 2200637Ia 450 991046145640332120200520144314.01-61122-123-4(CKB)2670000000092425(EBL)3018148(SSID)ssj0000523915(PQKBManifestationID)11341041(PQKBTitleCode)TC0000523915(PQKBWorkID)10543273(PQKB)11409334(MiAaPQ)EBC3018148(Au-PeEL)EBL3018148(CaPaEBR)ebr10659070(OCoLC)923657261(EXLCZ)99267000000009242520100820d2011 uy 0engurcn|||||||||txtccrLithography[electronic resource] principles, processes and materials /Theodore C. Hennessy, editorNew York Nova Sciencec20111 online resource (299 p.)Engineering tools, techniques and tablesNanotechnology science and technologyDescription based upon print version of record.1-61761-837-3 Includes bibliographical references and index.""LITHOGRAPHY:PRINCIPLES, PROCESSES AND MATERIALS""; ""CONTENTS""; ""PREFACE""; ""PRINCIPLE, PROCESSES AND MATERIALS FOR NANO IMPRINT LITHOGRAPHY""; ""1. INTRODUCTION""; ""2. PRINCIPLE AND FUNDAMENTAL PROCESS FOR NIL""; ""2.1. Principle of NIL""; ""2.2. Theoretical Analysis for NIL""; ""2.3. Fundamental Process for NIL""; ""3. VARIATIONS OF NIL PROCESSES""; ""3.1. Combined Thermal and UV-NIL""; ""3.2. Reverse Imprint Process""; ""3.3. Laser-Assisted Direct Imprint""; ""3.4. Roll Imprint Process""; ""3.5. Substrate Conformal Imprint Lithography (SCIL)""; ""3.6. Large Area Imprint""""3.7. Nanoelectrode Lithography""""3.8. Hybrid NIL Process""; ""3.9. Metal Nanoparticle Nanoimprinting Process""; ""3.10. High Resolution NIL""; ""3.11. Other NIL Processes""; ""4. NIL MATERIALS""; ""4.1. NIL Resists""; ""4.2. Functional Materials and Other Imprintable Materials""; ""4.3. Mold Materials""; ""5. PROSPECTS AND CHALLENGES IN NIL""; ""6. CONCLUSION""; ""ACKNOWLEDGMENTS""; ""REFERENCES""; ""NANOFABRICATION IN ELECTRONBEAM LITHOGRAPHY""; ""1. ELECTRON BEAM LITHOGRAPHY OVERVIEW""; ""1.1. Introduction to the Electron Beam Lithography System""; ""1.2. Proximity Effect""""1.3. Numerical Calculation of the E-beam (Monte Carlo Method)""""2. CARBON NANOTUBE (CNT) BASED DEVICES""; ""2.1.Introduction to carbon nanotubes ""; ""2.2. VACNT Based FE Device with Individual Cathode Structures""; ""2.3. Field Emission Properties of Single Vertically Aligned Carbon Nanotubes""; ""2. VARIO""; ""2.4. Application in Micro CNT Column System""; ""3. FABRICATION OF 3D NANOSTRUCTURES ON CYLINDRICAL ROLLERS""; ""3.1. Introduction to Nanolithography""; ""3.2. In-House Field Emission Measurement Facility""; ""4. CONCLUSIONS""; ""ACKNOWLEDGMENT""; ""REFERENCES""""GENERATION OF MICRO PATTERNS ONSIDE SURFACES OF POLYMER AND SISUBSTRATES USING A MICROPUNCHING LITHOGRAPHY APPROACH""""ABSTRACT""; ""1. INTRODUCTION""; ""2. MACROPUNCHING METHOD AND MPL""; ""3. AU SIDEWALL PATTERNS ON HDPE CHANNELS""; ""3.1. Fabrication Procedure""; ""3.2. Experimental Results and Discussions""; ""4. SUPER HYDROPHOBIC PDMS CHANNELS""; ""4.1. Fabrication Process""; ""4.2. Experimental Results and Discussions""; ""5. FABRICATION OF AU DOTS ON SI SIDEWALLS""; ""5.1. Fabrication Procedures""; ""5.2. Results and Discussions""; ""6. SUMMARY AND CONCLUSIONS""; ""ACKNOWLEDGMENTS""""REFERENCES""""LITHOGRAPHY: PRINCIPLES,PROCESSES AND MATERIALS""; ""ABSTRACT""; ""1. INTRODUCTION""; ""2. PRINCIPLE OF LITHOGRAPHY""; ""3. PROCESSES OF LITHOGRAPHY""; ""3.1. RIE-NSL Lithography [32]""; ""3.2. FIB Lithography""; ""3.3. Laser Interference Lithography""; ""4. MATERIALS OF LITHOGRAPHY""; ""4.1. Materials of RIE-NSL Lithography""; ""4.2. Materials of FIB Lithography""; ""4.3. Materials of Laser Interference Lithography""; ""5. CONCLUSIONS""; ""REFERENCES""; ""LASER INTERFERENCE LITHOGRAPHY""; ""ABSTRACT""; ""1. INTRODUCTION""; ""2. THEORY""; ""3. INSTRUMENTATION""""3.1. Choice of Laser""Engineering tools, techniques and tables.Nanotechnology science and technology series.MicrolithographyMicrofabricationElectronic books.Microlithography.Microfabrication.621.3815/31Hennessy Theodore C890639MiAaPQMiAaPQMiAaPQBOOK9910461456403321Lithography1989487UNINA01490nam 2200361 n 450 99639285950331620221108020258.0(CKB)4940000000110407(EEBO)2240953713(UnM)99866683(EXLCZ)99494000000011040719940415d1658 uy |engurbn||||a|bb|The faithfull Christians gain by death[electronic resource] opened, confirmed, and improved, in a sermon at the funeral of the Right Honourable Essex, Countess of Manchester, preached at Kimbolton, Octob. 12. 1658By Simeon Ashe minister of the gospel at St Augustines in Watling street, LondonLondon printed by A.M. for George Sawbridge at the sign of the Bible on Ludgate-Hill1659. [i.e. 1658][6], 42 pAnnotation on Thomason copy: "Nou: 16"; the 9 in the date has been crossed out and replaced with an 8; "1658 Nouemb: 16.".Reproduction of the original in the British Library.eebo-0018Funeral sermons17th centurySermons, EnglishEarly works to 1800Funeral sermons17th century.Sermons, EnglishAshe Simeond. 1662.1002261Cu-RivESCu-RivESCStRLINWaOLNBOOK996392859503316The faithfull Christians gain by death2372071UNISA