02018nam 2200613 a 450 991046135480332120200520144314.01-61728-318-5(CKB)2670000000090493(EBL)3019998(SSID)ssj0000471018(PQKBManifestationID)12123750(PQKBTitleCode)TC0000471018(PQKBWorkID)10417321(PQKB)10646264(MiAaPQ)EBC3019998(Au-PeEL)EBL3019998(CaPaEBR)ebr10675006(OCoLC)923662443(EXLCZ)99267000000009049320100506d2010 uy 0engur|n|---|||||txtccrLow-k nanoporous interdielectrics[electronic resource] materials, thin film fabrications, structures and properties /Moonhor Ree, Jinhwan Yoon and Kyuyoung HeoHauppauge, N.Y. Nova Science Publishersc20101 online resource (77 p.)Nanotechnology science and technologyDescription based upon print version of record.1-61668-749-5 Includes bibliographical references (p. [51]-61) and index.Nanotechnology science and technology series.Dielectric filmsMicroelectronicsMaterialsPorous materialsInterconnects (Integrated circuit technology)Electronic books.Dielectric films.MicroelectronicsMaterials.Porous materials.Interconnects (Integrated circuit technology)621.381Ree Moonhor991064Yoon Jinhwan991065Heo Kyuyoung991066MiAaPQMiAaPQMiAaPQBOOK9910461354803321Low-k nanoporous interdielectrics2267930UNINA